
描述
Overlay accuracy measurement device配置
無配置OEM 代工型號說明
Archer 10 is an Automated Optical Overlay Metrology product that provides control of overlay error budget for sub-0.13-micron production, increases throughput by 30%, and allows consistent measurement of low-contrast targets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文檔
無文檔
KLA
ARCHER 10
類別
Overlay
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132481
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Overlay accuracy measurement device配置
無配置OEM 代工型號說明
Archer 10 is an Automated Optical Overlay Metrology product that provides control of overlay error budget for sub-0.13-micron production, increases throughput by 30%, and allows consistent measurement of low-contrast targets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文檔
無文檔