概述

Caliper élan is an advanced 300mm overlay control system from Nanometrics. It is the most advanced overlay metrology solution from the company, building on the foundation of the original Caliper overlay inspection tool. Élan offers a cost-effective solution for advanced IC manufacturing processes, with a refined optics head and advanced focusing and algorithms. It provides a 50% improvement in overlay measurement uncertainty and greater than 50% MAM time improvement. It is production-ready, with GEM SECS suite and Automated Material Handling System integration as standard. The SynRG option supports waferless recipe creation, using advanced image simulation methods to produce robust, production-ready recipes. Élan is compatible with 200mm or 300mm wafers and offers a variety of handler configurations.