The Caliper Mosaic provides overlay metrology solutions, providing cost-effective solutions for today’s advanced 300mm overlay process technologies, available on Lynx platform. 

ONTO / NANOMETRICS / ACCENT / BIO-RAD

CALIPER MOSAIC

CALIPER ULTRA

Caliper élan is an advanced 300mm overlay control system from Nanometrics. It is the most advanced overlay metrology solution from the company, building on the foundation of the original Caliper overlay inspection tool. Élan offers a cost-effective solution for advanced IC manufacturing processes, with a refined optics head and advanced focusing and algorithms. It provides a 50% improvement in overlay measurement uncertainty and greater than 50% MAM time improvement. It is production-ready, with GEM SECS suite and Automated Material Handling System integration as standard. The SynRG option supports waferless recipe creation, using advanced image simulation methods to produce robust, production-ready recipes. Élan is compatible with 200mm or 300mm wafers and offers a variety of handler configurations.

CALIPER ELAN

CALIPER MOSAIC III

The Mosaic II provides cost effective overlay metrology solutions, for today's advanced 300mm overlay process technologies, and is available on Lynx platform.

CALIPER MOSAIC II

Following the success of the Caliper élan and Caliper Ultra systems supporting the 90nm, 65nm and 45nm technology nodes, the Caliper InSight takes the next step forward in platform and optical design to improve system precision and throughput for overlay metrology solutions down to the 32nm and 22nm technology nodes.

ONTO / NANOMETRICS / ACCENT / BIO-RAD

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CALIPER MOSAIC

CALIPER ULTRA

CALIPER ELAN

CALIPER MOSAIC III

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