描述
Molecular Vapor Deposition配置
Vapor-Phase Monolayer Vapor Deposition System System Configuration as follows: Manual Loading / up to an 8" round substrate x 1.2" deep. (9.5" x 9.5" x 1") Typical Capacity: Can accommodate die or special devices through manual loading Chamber is 4",6",8" capatible Up to three (3) 8" wafers with a special holder Up to three (3) 6" wafers with a special holder Temperature Controlled Aluminum Chamber - Programmable by Software Roughing Valve with Slow Pumping Port Chamber Baratron Capacitance Manometer Pressure Gauge (Heated) (0-10torr) Fully Integrated Inductively Coupled Downstream Plasma Source for surface modification and cleaning Includes Gate Valve Isolation of Plasma Source Electronic Mass Flow Controller for Plasma Source gas control - Oxygen 13.56MHz Dressler RF Generator (300Watts) 3 Vapor Delivery Lines includes three (3) Temperature Controlled Vapor Delivery lines includes three (3) Capacitance Manometer Pressure Gauge includes three (3) Vapor Expansion Volumes tuned for MVD-100 configuration includes three (3) 50cc SS-316 Vials with Manual Vacuum Valves Software: Touch-Screen Control System - Fully Automatic Process Sequencing Vacuum Pump Interface (The Buyer supplies a dry pump) - 40M3H or greater pump recommended for most applications. Emergency Power-off (EMO) Switch Vented Gas CabinetOEM 代工型號說明
Molecular Vapor Deposition System文檔
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SPTS / APPLIED MICROSTRUCTURES
MVD 100
已驗證
類別
MVD
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
75914
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SPTS / APPLIED MICROSTRUCTURES
MVD 100
類別
MVD
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
75914
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Molecular Vapor Deposition配置
Vapor-Phase Monolayer Vapor Deposition System System Configuration as follows: Manual Loading / up to an 8" round substrate x 1.2" deep. (9.5" x 9.5" x 1") Typical Capacity: Can accommodate die or special devices through manual loading Chamber is 4",6",8" capatible Up to three (3) 8" wafers with a special holder Up to three (3) 6" wafers with a special holder Temperature Controlled Aluminum Chamber - Programmable by Software Roughing Valve with Slow Pumping Port Chamber Baratron Capacitance Manometer Pressure Gauge (Heated) (0-10torr) Fully Integrated Inductively Coupled Downstream Plasma Source for surface modification and cleaning Includes Gate Valve Isolation of Plasma Source Electronic Mass Flow Controller for Plasma Source gas control - Oxygen 13.56MHz Dressler RF Generator (300Watts) 3 Vapor Delivery Lines includes three (3) Temperature Controlled Vapor Delivery lines includes three (3) Capacitance Manometer Pressure Gauge includes three (3) Vapor Expansion Volumes tuned for MVD-100 configuration includes three (3) 50cc SS-316 Vials with Manual Vacuum Valves Software: Touch-Screen Control System - Fully Automatic Process Sequencing Vacuum Pump Interface (The Buyer supplies a dry pump) - 40M3H or greater pump recommended for most applications. Emergency Power-off (EMO) Switch Vented Gas CabinetOEM 代工型號說明
Molecular Vapor Deposition System文檔
無文檔