描述
A PVD Cluster tool with two process chambers: 1. RMS Chamber with 5 targets (RF/DC capable) 2. iPVD chamber with 1 (Al) target (magnetron sputtering) Condition: In Working Condition Repairs required: Turbo Pump Mag-drive Maintenance required: Rough Pump配置
Configured to handle standard 8-inch notched wafers (can handle smaller wafers mounted on 8-inch carrier)OEM 代工型號說明
- Material evaluation due to co-sputter - Low initial costs on targets - COO - Flexible process configuration - Small footprint文檔
SINGULUS / STANGL
ROTARIS
已驗證
類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
82129
晶圓尺寸:
8"/200mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SINGULUS / STANGL
ROTARIS
類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
82129
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available