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描述
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX5000 Equipment status: Out of Fab Process: HQ-SiO2 (ALD) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-001 MFC, MFM: HORIBA_STEC Three phase power: 3Ø AC 440V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / H2 / TCS / NH3 / O2 / N2O / NF3 / SiH2Cl2 Others: ROBO 5000配置
Process: HQ-SiO2 (ALD) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEM 代工型號說明
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類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
72873
晶圓尺寸:
12"/300mm
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KOKUSAI-ELECTRIC (KE)
DJ-1206VN-DM
類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
72873
晶圓尺寸:
12"/300mm
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX5000 Equipment status: Out of Fab Process: HQ-SiO2 (ALD) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-001 MFC, MFM: HORIBA_STEC Three phase power: 3Ø AC 440V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / H2 / TCS / NH3 / O2 / N2O / NF3 / SiH2Cl2 Others: ROBO 5000配置
Process: HQ-SiO2 (ALD) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEM 代工型號說明
未提供文檔
無文檔