描述
無描述配置
- Wafer Type: 11x4”, 6x6”, 3x8” GaN on Silicon/SiC - Transfer Module: able to support up to 4 chambers - Pump: Edwards iXH645H - Chiller: SMC - MFCs Type: Horiba - MO Configuration: TMGa1/2, TMAl1/2, TEGa, Cp2Fe, TMIn, Cp2Mg - Doping Source: 2x External Dopant inlet - Inline Purifiers: H2, N2, NH3 - Dew Point Sensor: H2, N2OEM 代工型號說明
MOCVD system for production of GaN power devices文檔
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ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA (AMEC)
Prismo PD5
已驗證
類別
MOCVD
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96275
晶圓尺寸:
未知
年份:
2020
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA (AMEC)
Prismo PD5
類別
MOCVD
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96275
晶圓尺寸:
未知
年份:
2020
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
- Wafer Type: 11x4”, 6x6”, 3x8” GaN on Silicon/SiC - Transfer Module: able to support up to 4 chambers - Pump: Edwards iXH645H - Chiller: SMC - MFCs Type: Horiba - MO Configuration: TMGa1/2, TMAl1/2, TEGa, Cp2Fe, TMIn, Cp2Mg - Doping Source: 2x External Dopant inlet - Inline Purifiers: H2, N2, NH3 - Dew Point Sensor: H2, N2OEM 代工型號說明
MOCVD system for production of GaN power devices文檔
無文檔