描述
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area配置
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 代工型號說明
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AIXTRON
AIX G5+
類別
MOCVD
上次驗證: 13 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
146871
晶圓尺寸:
6"/150mm, 8"/200mm
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area配置
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 代工型號說明
未提供文檔
無文檔