描述
無描述配置
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEM 代工型號說明
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductors文檔
無文檔
AIXTRON
6x2 CCS
已驗證
類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Uncrated
產品編號:
67167
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AIXTRON
6x2 CCS
類別
MOCVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Uncrated
產品編號:
67167
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEM 代工型號說明
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductors文檔
無文檔