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描述
SSM 150 Auto Spreading Resistance Probe (ASRP) *. Fully refurbished. *. Installed in Clean-room. *. Available Demo Test and Inspection配置
Working *. Process: Spreading resistance probe *. Measurement perfomance: - Resistivity and Dopant concentration - Resistance measurement & Carrier concentration profile analysis in all structures of silicon Resistance: 1 1 to >E10 Resistivity: 10-⁴Ωcm~4x10⁴ Dopant Concentration: >10²¹cm-³ to < 10¹¹cm-³ *. Measurement configuration: - Carrier concentration profile analysis & Depth measurement *. Hardware configuration: - Standard Microscope/Probe Assembly Test Unit - Electronics Cabinet with Probe Unit, Pneumatics Control, etc - Probe subsystem with Anti-Vibration table - Optic Fiber Light Sources and Holder - IBM Computer Package & LCD Color monitor - 110V/50/60Hz *. Software configuration: - Operation System: MS DOS 3.3 - Operation Software: D150 Version 5.12 *. Accessory (Option): - Lapping Machine, N/P Type unit and Probes,QTA/PEN, Gorey-Schnider grinder,Angle dies,others (100)N.P (111)N,P calibration STD setsOEM 代工型號說明
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SSM
150
類別
Metrology
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
66031
晶圓尺寸:
未知
年份:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
SSM 150 Auto Spreading Resistance Probe (ASRP) *. Fully refurbished. *. Installed in Clean-room. *. Available Demo Test and Inspection配置
Working *. Process: Spreading resistance probe *. Measurement perfomance: - Resistivity and Dopant concentration - Resistance measurement & Carrier concentration profile analysis in all structures of silicon Resistance: 1 1 to >E10 Resistivity: 10-⁴Ωcm~4x10⁴ Dopant Concentration: >10²¹cm-³ to < 10¹¹cm-³ *. Measurement configuration: - Carrier concentration profile analysis & Depth measurement *. Hardware configuration: - Standard Microscope/Probe Assembly Test Unit - Electronics Cabinet with Probe Unit, Pneumatics Control, etc - Probe subsystem with Anti-Vibration table - Optic Fiber Light Sources and Holder - IBM Computer Package & LCD Color monitor - 110V/50/60Hz *. Software configuration: - Operation System: MS DOS 3.3 - Operation Software: D150 Version 5.12 *. Accessory (Option): - Lapping Machine, N/P Type unit and Probes,QTA/PEN, Gorey-Schnider grinder,Angle dies,others (100)N.P (111)N,P calibration STD setsOEM 代工型號說明
未提供文檔
無文檔