描述
Wafer / Reticle inspection .15um particle detection / bare silicon配置
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM 代工型號說明
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文檔
無文檔
類別
Metrology
上次驗證: 3 天前
關鍵商品詳情
條件:
New
作業狀態:
Installed / Running
產品編號:
153188
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
類別
Metrology
上次驗證: 3 天前
關鍵商品詳情
條件:
New
作業狀態:
Installed / Running
產品編號:
153188
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Wafer / Reticle inspection .15um particle detection / bare silicon配置
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM 代工型號說明
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文檔
無文檔