概述

The Metra 7200 is Nanometrics’ advanced overlay metrology and CD measurement system. The Metra’s high throughput and on-board, real-time, stepper-specific modeling provides the fastest time-to-decision for making accurate stepper adjustments. The Metra’s stepper-specific modeling software analyzes every unique stage and lens term to provide the tightest overlay possible, directly improving device performance and yield. Complete analysis can be performed for any stepper including Nikon, Canon, SVGL and Ultratech. The Metra’s analysis uses an embedded version of the ARGUS® stepper modeling library developed by New Vision Systems. In addition, the system’s multi-tasking Windows NT®-based software allows engineering functions, such as recipe creation, to occur simultaneously while production wafers are being measured, thus providing high equipment utilization.