描述
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.配置
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEM 代工型號說明
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N & K
1700RT
已驗證
類別
Metrology
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
66004
晶圓尺寸:
未知
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
N & K
1700RT
類別
Metrology
上次驗證: 超過30天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
66004
晶圓尺寸:
未知
年份:
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.配置
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEM 代工型號說明
未提供文檔
無文檔