Quantox XP is an in-line, real-time electrical monitoring and characterization tool that enables advanced gate formation for sub-130 nm devices. It provides better than 95% correlation to device electrical test data and allows non-contact electrical test measurements of key transistor gate parameters. ACTIV technology features highly accurate, comprehensive data on physical and electrical properties of advanced gate dielectric materials. Quantox XP offers a complete gate monitoring solution for today’s advanced gate dielectric processes. It also provides comprehensive films metrology control using optical and electrical topography measurements.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

QUANTOX XP

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