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6" Fab For Sale from Moov - Click Here to Learn More
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SiPHER

類別
Metrology
概述

The SiPHER is a fully automated photoluminescence metrology system for the detection and mapping of 300mm substrate defects and metallic contamination. SiPHER detects and quantifies near surface and bulk metallic contamination in both bulk silicon and silicon epitaxial layers.

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