描述
Film Thickness Measurement配置
無配置OEM 代工型號說明
The Nanometrics FLX is a flexible metrology system that offers cost-efficiency and high throughput for 300 mm standalone metrology. It is based on Nanometrics’ proven integrated metrology solutions and can support up to four integrated metrology modules simultaneously. The tool can mix-and-match any combination of modules to form a complete metrology solution for lithography, CMP, etch, and CVD/deposition processes. This capability accelerates process development through parallel development of integrated metrology solutions. The system offers industry-leading throughput of 250-500 wafers fueled by dual multi-axis wafer-handling robots.文檔
無文檔
類別
Metrology
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
151434
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ONTO / NANOMETRICS / ACCENT / BIO-RAD
FLX
類別
Metrology
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
151434
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Film Thickness Measurement配置
無配置OEM 代工型號說明
The Nanometrics FLX is a flexible metrology system that offers cost-efficiency and high throughput for 300 mm standalone metrology. It is based on Nanometrics’ proven integrated metrology solutions and can support up to four integrated metrology modules simultaneously. The tool can mix-and-match any combination of modules to form a complete metrology solution for lithography, CMP, etch, and CVD/deposition processes. This capability accelerates process development through parallel development of integrated metrology solutions. The system offers industry-leading throughput of 250-500 wafers fueled by dual multi-axis wafer-handling robots.文檔
無文檔