描述
VARIAN EHP500 MEDIUM CURRENT SYSTEM WITH OPTIONS (PEA605)配置
Software Version - V13.43.29 CIM - GEM and SECS Process - Medium Current Implanter Handler System - Endstation PP+ with both Loadlock Excluded Lock Lock Rough LHS & RHS LPT Analyzer Turbo Pump & Controller Endstation 2 stage pump Target cryo CT10 IHS and RHS LL turbo pump Source Rough pump Source Turbo pump and controller Beamline turbo pump and controllerOEM 代工型號說明
The E500-EHP is a medium current ion implanter made by AMAT (Varian). It processes one or two cassettes of wafers as a batch, a single wafer at a time.文檔
類別
Medium Current
上次驗證: 30 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
150920
晶圓尺寸:
8"/200mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部
APPLIED MATERIALS (AMAT) / VARIAN
E500-EHP
類別
Medium Current
上次驗證: 30 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
150920
晶圓尺寸:
8"/200mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available