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描述
pump 2配置
Process Gas:CDA/N2/Ar/ASH3/BF3OEM 代工型號說明
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.文檔
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ULVAC
SOPHI-200
類別
Medium Current
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
130326
晶圓尺寸:
6"/150mm
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
pump 2配置
Process Gas:CDA/N2/Ar/ASH3/BF3OEM 代工型號說明
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.文檔
無文檔