描述
Medium Current Ion Implanter配置
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 代工型號說明
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.文檔
無文檔
AXCELIS
PURION M
類別
Medium Current
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132929
晶圓尺寸:
6"/150mm
年份:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Medium Current Ion Implanter配置
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 代工型號說明
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.文檔
無文檔