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描述
Mid Current Implanter配置
無配置OEM 代工型號說明
Axcelis Technologies' 8250 medium current line uses an ultra-pure, parallel beam design enhanced by extremely precise wafer positioning, enabling the minute detailing of transistors. The 8250 provides the advanced process capabilities necessary for medium current implants. Incorporating several key productivity enhancements in its design, it offers enhanced yield and serial processing advantages. This system is a fully automated, 200mm, serial processing system designed to maximize productivity and minimize all forms of contamination. Production-proven beam optics and wafer position control deliver pure, parallel and repeatable beams. The 8250 is the industry's only medium current system to incorporate a final energy filter, ensuring maximum beam purity over the entire energy range of multiply-charged species up to 750keV. New features such as the extended life source (ELS), electrostatic chuck, fully integrated statistical process control (SPC), and slit load lock process chamber allow the 8250 to provide superior processing capability at the lowest cost of ownership.文檔
無文檔
AXCELIS
NV 8250
類別
Medium Current
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
101955
晶圓尺寸:
8"/200mm
年份:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Mid Current Implanter配置
無配置OEM 代工型號說明
Axcelis Technologies' 8250 medium current line uses an ultra-pure, parallel beam design enhanced by extremely precise wafer positioning, enabling the minute detailing of transistors. The 8250 provides the advanced process capabilities necessary for medium current implants. Incorporating several key productivity enhancements in its design, it offers enhanced yield and serial processing advantages. This system is a fully automated, 200mm, serial processing system designed to maximize productivity and minimize all forms of contamination. Production-proven beam optics and wafer position control deliver pure, parallel and repeatable beams. The 8250 is the industry's only medium current system to incorporate a final energy filter, ensuring maximum beam purity over the entire energy range of multiply-charged species up to 750keV. New features such as the extended life source (ELS), electrostatic chuck, fully integrated statistical process control (SPC), and slit load lock process chamber allow the 8250 to provide superior processing capability at the lowest cost of ownership.文檔
無文檔