描述

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配置

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OEM 代工型號說明

The Canon MPA-600Super is a 1:1 mirror projection mask aligner that features improved overlay accuracy for mass production of VLSI devices. It was developed based on the MPA-600FA and MPA-500FAb and achieves better yield, higher throughput, and improved stability. It can handle wafer sizes ranging from 4 to 6 inches and mask sizes from 5 to 7 inches.