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描述
Medium Current Implant配置
-Software Version: 1.7.0.4.DP14 -CIM: GEM -Process: ImplantOEM 代工型號說明
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.文檔
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AXCELIS
OPTIMA MD
類別
Low Current
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
112994
晶圓尺寸:
12"/300mm
年份:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Medium Current Implant配置
-Software Version: 1.7.0.4.DP14 -CIM: GEM -Process: ImplantOEM 代工型號說明
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.文檔
無文檔