描述
50kV eWrite column technology 50MHz pattern generator 200mm wafer handling capability High throughput single digit nanolithography Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx) technologies配置
無配置OEM 代工型號說明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文檔
無文檔
RAITH
VOYAGER
類別
Lithography
上次驗證: 18 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137373
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
50kV eWrite column technology 50MHz pattern generator 200mm wafer handling capability High throughput single digit nanolithography Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx) technologies配置
無配置OEM 代工型號說明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文檔
無文檔