描述
Electron beam lithography (EBL) system配置
Known issues: Interferometer stage laser and chiller reportedly down 50 kV eWrite column technology 50 MHz pattern generator Fixed-beam-moving-stage (FBMS traxx) / modulated-beam-moving-stage (MBMS periodixx) lithography Replacement parts quoted on 9/28/2026: He-Ne laser module SL02/R2, SIOS laser source, TÜV-conform service part High-voltage power supply G603-78, v02 PSU HiTeK, exchange basis LX1 water-cooled chiller, 230 V, LX1-W2AG3T3D-O-AL-6, Haskris P/N FG24447 DENKA cathode Type Module C2 for eWrite column Copper gun head seal, Lesker P/N GA-0600 Agilent TwisTorr 304 FS turbopump, ISO 100, water cooling, flange 20761 and inlet screen TT304 onboard controller, 24 VDC, programmed to address 2, open frequency range SysPSU-X5_ChTMPctrl-MainsOEM 代工型號說明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文檔
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RAITH
VOYAGER
類別
Lithography
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137373
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Electron beam lithography (EBL) system配置
Known issues: Interferometer stage laser and chiller reportedly down 50 kV eWrite column technology 50 MHz pattern generator Fixed-beam-moving-stage (FBMS traxx) / modulated-beam-moving-stage (MBMS periodixx) lithography Replacement parts quoted on 9/28/2026: He-Ne laser module SL02/R2, SIOS laser source, TÜV-conform service part High-voltage power supply G603-78, v02 PSU HiTeK, exchange basis LX1 water-cooled chiller, 230 V, LX1-W2AG3T3D-O-AL-6, Haskris P/N FG24447 DENKA cathode Type Module C2 for eWrite column Copper gun head seal, Lesker P/N GA-0600 Agilent TwisTorr 304 FS turbopump, ISO 100, water cooling, flange 20761 and inlet screen TT304 onboard controller, 24 VDC, programmed to address 2, open frequency range SysPSU-X5_ChTMPctrl-MainsOEM 代工型號說明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.文檔
無文檔