描述
Maskless exposure system配置
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEM 代工型號說明
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.文檔
無文檔
類別
Lithography
上次驗證: 20 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
131095
晶圓尺寸:
未知
年份:
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVGROUP (EVG)
LITHOSCALE
類別
Lithography
上次驗證: 20 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
131095
晶圓尺寸:
未知
年份:
2023
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Maskless exposure system配置
Automated substrate handling for low-volume manufacturing High-precision stage with contactless wedge-error compensation Self-calibration through integrated sensors Expandable to two exposure heads Separate control unit EVG CIM Framework software Automatic initialization and startup diagnostics PC-controlled operation Solid-state drive and hard drive Supported layout format: GDSIIOEM 代工型號說明
LITHOSCALE is a revolutionary, highly versatile maskless exposure lithography platform geared for a variety of microfabrication applications accommodating wafers up to 300 mm.文檔
無文檔