描述
無描述配置
Accelaration voltage: 50 kV Field size: 1600 μm x800 μm Beam current: 3.5 μA Beam size: 4 μm x4 μm variable shaped beam Scanning speed: 8 MHz Stitching accuracy: 45 nm Overlay accuracy: 45 nm Substrate size: 3 inchOEM 代工型號說明
未提供文檔
無文檔
ADVANTEST
F5112
類別
Lithography
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
134374
晶圓尺寸:
未知
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Accelaration voltage: 50 kV Field size: 1600 μm x800 μm Beam current: 3.5 μA Beam size: 4 μm x4 μm variable shaped beam Scanning speed: 8 MHz Stitching accuracy: 45 nm Overlay accuracy: 45 nm Substrate size: 3 inchOEM 代工型號說明
未提供文檔
無文檔