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描述
Laser System配置
System specifications: Power: ≤ 30 W. Pulseshape temp.:≥ 10 ns. Pulse to Pulse stability: ± 12 %. Beam divergence: ≤ 0.2 mrad. Bandwidth(T mode): ≤3 pm. Tuning range (T mode): ≥ 0.4 nm Pulse length: ~ 20ns PC control. Laser medium: ArF (193 nm), KrF (248 nm), XeCl (308 nm) CDRH-class (laser classification): IV Dimensions w/out computer: (L x H x W): 1960 x 1350 x 828 mm³ Weight: 875 kg Two separately charged and switched laser heads built as single unit. Choice of operations: a)Oscillator-Power-Amplifier (OPA) Mode b)Tuning Mode c)Two-Color Mode at pulse energies up to 500 mJ and repetition rates up to 50 Hz. All modules of system contained within laser cabinet. Wheels on unit for easy movement to different operating sites. Extra space available for optional halogen gas generator and 50-liter premix gas bottle.OEM 代工型號說明
未提供文檔
無文檔
類別
Laser
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22738
晶圓尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAMBDA PHYSIK
COMPEX 150
類別
Laser
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22738
晶圓尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Laser System配置
System specifications: Power: ≤ 30 W. Pulseshape temp.:≥ 10 ns. Pulse to Pulse stability: ± 12 %. Beam divergence: ≤ 0.2 mrad. Bandwidth(T mode): ≤3 pm. Tuning range (T mode): ≥ 0.4 nm Pulse length: ~ 20ns PC control. Laser medium: ArF (193 nm), KrF (248 nm), XeCl (308 nm) CDRH-class (laser classification): IV Dimensions w/out computer: (L x H x W): 1960 x 1350 x 828 mm³ Weight: 875 kg Two separately charged and switched laser heads built as single unit. Choice of operations: a)Oscillator-Power-Amplifier (OPA) Mode b)Tuning Mode c)Two-Color Mode at pulse energies up to 500 mJ and repetition rates up to 50 Hz. All modules of system contained within laser cabinet. Wheels on unit for easy movement to different operating sites. Extra space available for optional halogen gas generator and 50-liter premix gas bottle.OEM 代工型號說明
未提供文檔
無文檔