描述
Laser System配置
無配置OEM 代工型號說明
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).文檔
無文檔
類別
Laser
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
21079
晶圓尺寸:
未知
年份:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML / CYMER
ELS-4000
類別
Laser
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
21079
晶圓尺寸:
未知
年份:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Laser System配置
無配置OEM 代工型號說明
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).文檔
無文檔