描述

Etcher System

配置

CTC / TM Rack PM Rack Main Power Cabinet Polished SST chamber 1) Two service access doors (1) Source door (2) Acess door 2) Shuttered viewport Computer and Software based MS windows control system w/GUI interface CTC(Cluster Tool Control) (1) Computer: IBM e Server (2) CTCflex s/w: V01.08.08 PM (1) Computer : Comark computer (2) PM s/w: V27.11.11.00 Ion Source System: 2) Source assy and power supplies (1) Source assy: Veeco RF350-5 Zone (2) Suppressor: SPELLMAN SL300 (3) Discharge: SPELLMAN SL1200 (4) RF: Seren R2001 (5) Source shutter on Source system: 1) PBN assy and power supplies (1) PBN assy: Stardand PBN-Filament (2)Body: SORENSON DCS60-18E (3)Discharge: SORENSON DCS60-18E (4) Filament: SORENSON DCS20-150E Substrate Fixture Assy: Std. Flowcool fixture with clamp, rotation, tilt and sweep 1)Backside substrate cooling system with Veeco patented Flowcool technology 2)One set 8” fixture tooling for substrate handling with tooling 3)Galil Motion Control: (1) Rotation: 0~10 rpm (2) Tilt: -70~90 deg 4)Flowcool Menometer: MKS 5)Cooling Water Temp Monitor: Micromega Vacuum System: 1) Pumps: (1) Turbo molecular pump (with VAT gate valve): Lebold Mag 2000 (2) Dry pump: Edwards EPX180 2) Gauges (1) Convectron Gauges: GP275 (2) Ion Gauge: ETi 8142 EndPoint: Hiden Analytical System OS:WinXP Hiden MASoft Version:6.33.0.65 Turbo: Pfeiffer TMU07-003 P Gate Valve:A-260567 Gauge: Edwards D14644000 Utility System 1) N2 2) PCW 3) Cooling water for Fixture 4) CDA Chiller: Water cooled chiller with Veeco by-pass kit: NesLab HX+300w/c 5 sided central wafer handler: Brooks MX500 1) Vacuum system: (1) One turbo pump: Leybold Turbo 361 (2) One dry pump: Edwards EPX180 2. LoadLock: Vacuum cassette elevator, supporting up to 25x 4”/6”/8” std. wafers/cassette(Shared rough pump) 3. Aligner: Supporting 4”/6”/8” wafers Computer and Software 1) Computer: Comark Computer 2) TM Software: 14.08.03.00 Main AC Power Distribution System: Veeco std. main power distribution cabinet with emergency shutdown function actuated thru EMO buttons. 1.SEMI S2/S8 Compliance 2.The tool can be switched between supporting 4“、6” and 8”wafers thru changing relative kits. 3.The Ion Gauge can be upgraded to GP354 from Eti 8142.