
描述
implanter配置
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM 代工型號說明
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類別
Ion Implantation
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
139224
晶圓尺寸:
4"/100mm
年份:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
IH-860DSIC
類別
Ion Implantation
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
139224
晶圓尺寸:
4"/100mm
年份:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
implanter配置
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM 代工型號說明
未提供文檔
無文檔