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描述
無描述配置
Vacuum Chamber: SUS304,Ф1550*1800MM Substrate Dome Size: Ф1400mm Substrate Dome Rotation Speed: 10rpm to 30rpm (Variable) Optical Film Thickness Control System "HOM2- -R -VIS350A,Wavelength range: 350nm to 1100nm Reflection/Transmittance" Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 17 cm RF ion source Vacuum System: "Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap"OEM 代工型號說明
未提供文檔
無文檔
OPTORUN
OTFC-1550
類別
Ion Beam / IBD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
59518
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Vacuum Chamber: SUS304,Ф1550*1800MM Substrate Dome Size: Ф1400mm Substrate Dome Rotation Speed: 10rpm to 30rpm (Variable) Optical Film Thickness Control System "HOM2- -R -VIS350A,Wavelength range: 350nm to 1100nm Reflection/Transmittance" Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 17 cm RF ion source Vacuum System: "Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap"OEM 代工型號說明
未提供文檔
無文檔