描述
無描述配置
Vacuum Chamber: SUS304 φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 23 cm RF ion source Vacuum System: Roughing Pump 2 Diffusion Pumps + Poly cold Power Requirements: 3-phase 200V 50/60Hz 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 11000kg approx.OEM 代工型號說明
未提供文檔
OPTORUN
OTFC-1550
類別
Ion Beam / IBD
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
59518
晶圓尺寸:
未知
年份:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available