描述
Optical Coating machine配置
無配置OEM 代工型號說明
The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.文檔
無文檔
OPTORUN
OTFC-1300
類別
Ion Beam / IBD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
123138
晶圓尺寸:
未知
年份:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Optical Coating machine配置
無配置OEM 代工型號說明
The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.文檔
無文檔