描述
無描述配置
Optorun 1300 model OTFC Dome substrate holder, chamber 1300mm diameter High index crucible ring type, 20 pockets Low index crucible single pocket Ion beam source as assist ion source. Computer Window 10 or 11. Mechainical pump, Polycold 1100 pump Automatic substrate flip dome systemOEM 代工型號說明
The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.文檔
OPTORUN
OTFC-1300
類別
Ion Beam / IBD
上次驗證: 24 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
137863
晶圓尺寸:
未知
年份:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available