描述
FIB配置
FIB ●Simple Config ①Stage Type：Side Entry Type A, Eucentric Stage Type E ②Attached holder：μ Sampling Holder, Shared Revolver Holder, Shared Revolver Mesh Holder ●Simple performance： ①Accelerating voltage：10～40kV ②Max beam current：30nA at 40kV ③MAX beam current density：25A/c㎡ at 40kV ④Resolution：6nm at 40kV ⑤Vacuum degree: Ion source room/6×10-6、Sample chamber/6×10-4 ●Audit Result Audit item is Resolution, Magnification, Vacuum degree, Each operation.OEM 代工型號說明
未提供文檔
HITACHI
FB-2100
類別
Inspection Equipment
上次驗證: 11 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
82626
晶圓尺寸:
未知
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available