描述

High Current Implanter System on-line - Yes CE mark Certified - Yes All Cables present ? Yes Any Corrosion visible on modules ? No Handler Options - 150mm hot chuck Pre - Aligner - Yes Mini Environment - Yes Software - Windows 10 System Software (APP) Version - 3.8.3.0.2 SEMI Std Options - E84 Chiller Facility Requirements CDA Yes DIW Yes Gas GN2,PN2,Ar Power 480V 3phase 5Wire