描述
High Energy Implanter 1.2 MeV配置
-Set up for Open 6 inch wafer cassette loading Seiko Seiki Pumps with Edwards rough pumps. CTi Cryos. ELS source - LINAC with resonators - Gas Box - PH3 SDS, BF3, Xe and Ar - StandardOEM 代工型號說明
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AXCELIS
NV GSD/HE
類別
High Current
上次驗證: 4 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Down
產品編號:
148407
晶圓尺寸:
6"/150mm
年份:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
High Energy Implanter 1.2 MeV配置
-Set up for Open 6 inch wafer cassette loading Seiko Seiki Pumps with Edwards rough pumps. CTi Cryos. ELS source - LINAC with resonators - Gas Box - PH3 SDS, BF3, Xe and Ar - StandardOEM 代工型號說明
未提供文檔
無文檔