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描述
無描述配置
無配置OEM 代工型號說明
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.文檔
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AXCELIS
GSD 200E2
類別
High Current
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
124984
晶圓尺寸:
未知
年份:
2001
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描述
無描述配置
無配置OEM 代工型號說明
The GSD/200E2 is a 200mm standard high current implanter with a maximum energy of 180KeV. It offers reliable, high productivity and exceptional product control with unmatched cost of ownership. It meets advanced manufacturing requirements through the 180nm node and maintains high throughput for quad implants used for trench doping. It features an Extended Life Source, a Xenon-based Plasma Electron Flood, and real-time dose control for consistent low doses.文檔
無文檔