描述
CVD system配置
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM 代工型號說明
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類別
Gas Cabinets
上次驗證: 5 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154812
晶圓尺寸:
12"/300mm
年份:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
CVD system配置
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM 代工型號說明
未提供文檔
無文檔