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描述
Tube Furnace配置
Tube 1: Wet Oxide & drive in SiC Tube Tube 2:Wet Oxide & drive in SiC Tube Tube 3: Wet Oxide flow No Tube 4: Wet Oxide flow NoOEM 代工型號說明
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.文檔
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THERMCO
5200
類別
Furnaces / Diffusion
上次驗證: 超過60天前
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條件:
Used
作業狀態:
未知
產品編號:
73040
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年份:
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描述
Tube Furnace配置
Tube 1: Wet Oxide & drive in SiC Tube Tube 2:Wet Oxide & drive in SiC Tube Tube 3: Wet Oxide flow No Tube 4: Wet Oxide flow NoOEM 代工型號說明
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.文檔
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