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TEL / TOKYO ELECTRON ALPHA(α)-303i
    描述
    FURNACE
    配置
    K type / Poly
    OEM 代工型號說明
    The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.
    文檔

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    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    verified-listing-icon

    已驗證

    類別
    Furnaces / Diffusion

    上次驗證: 超過60天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    83611


    晶圓尺寸:

    12"/300mm


    年份:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
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    TEL / TOKYO ELECTRON ALPHA(α)-303i

    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    Furnaces / Diffusion
    年份: 2008條件: 二手
    上次驗證22 天前

    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    verified-listing-icon
    已驗證
    類別
    Furnaces / Diffusion
    上次驗證: 超過60天前
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    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    83611


    晶圓尺寸:

    12"/300mm


    年份:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    FURNACE
    配置
    K type / Poly
    OEM 代工型號說明
    The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.
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    無文檔

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