描述
LPCVD配置
-Wafer size : 4inch, 6inch, 8inch, 125Sq, 156Sq -Capability : 70 wafers/batch -Process : Wet/Dry Oxidation, Poly Si, (Low Stress), SiNx, (B)PSG process -Uniformity : ±0.5~1%(Oxidation), ±1~2%(Poly Si, SiNx), ±3~5%(BPSG)OEM 代工型號說明
未提供文檔
無文檔
CENTROTHERM
E1550
已驗證
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
105915
晶圓尺寸:
4"/100mm, 6"/150mm, 8"/200mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CENTROTHERM
E1550
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
105915
晶圓尺寸:
4"/100mm, 6"/150mm, 8"/200mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
LPCVD配置
-Wafer size : 4inch, 6inch, 8inch, 125Sq, 156Sq -Capability : 70 wafers/batch -Process : Wet/Dry Oxidation, Poly Si, (Low Stress), SiNx, (B)PSG process -Uniformity : ±0.5~1%(Oxidation), ±1~2%(Poly Si, SiNx), ±3~5%(BPSG)OEM 代工型號說明
未提供文檔
無文檔