描述
Furnace配置
Diffusion/oxidation/alloy/annealing/LPVDOEM 代工型號說明
This four-chamber furnace is built to process semiconductor, nano, PV, LED, and MEMS substrates up to 150 mm in diameter. Constructed from steel, Thermco’s Model 5200 Diffusion Furnace is designed to withstand operating temperatures of 200-1250°C with a cool down rate of at least 3°C per minute. The furnace is controlled by a Thermco TMX controller and its system includes one MUX computer and one control computer per tube. Each chamber accommodates process tubes up to 10 inches (251 mm) in diameter. Compatible with Model 5000LS, D1, D2, and 5000SC.文檔
無文檔
AVIZA / SVG / THERMCO
5200
已驗證
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63376
晶圓尺寸:
6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AVIZA / SVG / THERMCO
5200
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63376
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Furnace配置
Diffusion/oxidation/alloy/annealing/LPVDOEM 代工型號說明
This four-chamber furnace is built to process semiconductor, nano, PV, LED, and MEMS substrates up to 150 mm in diameter. Constructed from steel, Thermco’s Model 5200 Diffusion Furnace is designed to withstand operating temperatures of 200-1250°C with a cool down rate of at least 3°C per minute. The furnace is controlled by a Thermco TMX controller and its system includes one MUX computer and one control computer per tube. Each chamber accommodates process tubes up to 10 inches (251 mm) in diameter. Compatible with Model 5000LS, D1, D2, and 5000SC.文檔
無文檔