描述
ASM A400 with one standard Power Poly reactor and one Dope Power Poly reactor.配置
ASMi A400 LPCVD Dope PP & LPCVD std PP reactor Heater type: 5 zones Gas panel layout: SiH4 - N2 - Dopand Brooks MFC's Process pressure: 80 ÷ 120 mTorr Process temperature: 620 - 680 °C Genmark MK4 Robot Paddle temprature control PowerPoly specific flanges temp controlled at 80 °C Gas/smoke detection of SiH4OEM 代工型號說明
The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing.文檔
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ASM
A400
已驗證
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
65295
晶圓尺寸:
未知
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
A400
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
65295
晶圓尺寸:
未知
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
ASM A400 with one standard Power Poly reactor and one Dope Power Poly reactor.配置
ASMi A400 LPCVD Dope PP & LPCVD std PP reactor Heater type: 5 zones Gas panel layout: SiH4 - N2 - Dopand Brooks MFC's Process pressure: 80 ÷ 120 mTorr Process temperature: 620 - 680 °C Genmark MK4 Robot Paddle temprature control PowerPoly specific flanges temp controlled at 80 °C Gas/smoke detection of SiH4OEM 代工型號說明
The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing.文檔
無文檔