描述
Backside Usher配置
無配置OEM 代工型號說明
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controller文檔
無文檔
YAMATO SCIENTIFIC
PDC510
已驗證
類別
Etch/Asher
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
71182
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
YAMATO SCIENTIFIC
PDC510
類別
Etch/Asher
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
71182
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Backside Usher配置
無配置OEM 代工型號說明
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controller文檔
無文檔