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描述
Sitting idle, less chlorine gasses, and can fired up if need be.配置
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM 代工型號說明
RIE(Reactive lon Etch) & Manual Loader文檔
無文檔
類別
Etch/Asher
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63639
晶圓尺寸:
未知
年份:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
WONIK IPS
Helitex AAS0
類別
Etch/Asher
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
63639
晶圓尺寸:
未知
年份:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Sitting idle, less chlorine gasses, and can fired up if need be.配置
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM 代工型號說明
RIE(Reactive lon Etch) & Manual Loader文檔
無文檔