描述
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & Ar配置
無配置OEM 代工型號說明
未提供文檔
無文檔
類別
Etch/Asher
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
135817
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MEYER BURGER
AP 800
類別
Etch/Asher
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
135817
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & Ar配置
無配置OEM 代工型號說明
未提供文檔
無文檔