描述
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer配置
無配置OEM 代工型號說明
未提供文檔
無文檔
HITACHI
M 308AE
類別
Etch/Asher
上次驗證: 超過60天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
133660
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer配置
無配置OEM 代工型號說明
未提供文檔
無文檔