描述
Dry etch system配置
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM 代工型號說明
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類別
Epitaxial deposition (EPI)
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154777
晶圓尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA ACP
類別
Epitaxial deposition (EPI)
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154777
晶圓尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Dry etch system配置
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM 代工型號說明
未提供文檔
無文檔