描述
無描述配置
Details Attached System: System controller Board no missing Loadlock Widebody ENP 0240-70932 / 0240-70933 No Process Kit (Quartz part, Robot blade, Graphite process kit) include No 208V External transformer includ EPI Variable speed blower (#A,B,C) Dop1 N2 860cc Brooks / Dop2 H2 500cc UFC8100 H2 Main → N2 20L UFC1660 / H2 20L UFC1661 Chamber A: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber B: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part Box Chamber C: 1) Baratron Gauge Model : 1000T MKS 623B13TBE Single 2) Pyrometer Model : Ircon MRT39999C(K118) 2ea (Upper / Lower → Aux N/A) 3) Rotation assy 0010-26665 → In the Part BoxOEM 代工型號說明
The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.文檔
類別
Epitaxial deposition (EPI)
上次驗證: 9 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
155986
晶圓尺寸:
未知
年份:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA EPI
類別
Epitaxial deposition (EPI)
上次驗證: 9 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
155986
晶圓尺寸:
未知
年份:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available