描述
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A配置
無配置OEM 代工型號說明
未提供文檔
無文檔
ULVAC
NE-950
已驗證
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
79021
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
NE-950
類別
Dry / Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
79021
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Host console- 125*300*210 cm/1500 NameplateNE-950 Auxiliary machine- chiller(40*100*100 cm/100kg ) pump(38*100*55 cm/100kg ) pump(38*100*55 cm/100kg ) Machine condition- Damaged, no missing parts Damage description- The Turbo pump is severely damaged and cannot be repaired, and the vacuum transfer arm is damaged. Whether there are high and low frequencies- YES Upper electrode: 13.56MHz Lower electrode: 12.5MHz Gas type- Ar, O2, N2, CF4, Cl2, BCl3 Current- Three-phase five-wire 208V/120A配置
無配置OEM 代工型號說明
未提供文檔
無文檔