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TRION TITAN
    描述
    Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor
    配置
    System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS
    OEM 代工型號說明
    Vacuum loadlocked plasma system
    文檔
    文件圖示

    TRION TITAN.pdf

    TRION

    TITAN

    verified-listing-icon

    已驗證

    類別
    Dry / Plasma Etch

    上次驗證: 超過60天前

    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    63718

    晶圓尺寸:

    3"/75mm, 6"/150mm, 8"/200mm

    年份:

    未知

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    TRION TITAN

    TRION

    TITAN

    Dry / Plasma Etch
    年份: 0條件: 二手
    上次驗證超過60天前

    TRION

    TITAN

    verified-listing-icon
    已驗證
    類別
    Dry / Plasma Etch
    上次驗證: 超過60天前
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/7a2621d1737441788dc7c91a0b351e44_ad44ce76306d4dd492270e1d08dee43045005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/d66a235490104a4d9414b6e970a59ad6_0bc2f2a817fa4491b23ecddad501092645005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/257671f6c3ad4078b065ef9f967ac15e_055178a9bcdb4108a16f4d7d97bc23fa45005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/045bff4815d24002b1a5eaf6f9e4acb9_20240605141247_mw.jpg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/1c5a4553539c4ec69103ad58a8f689ed_trioncham1_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/101ae6ed36794ceca27351e2573945f0_trioncham2_mw.jpeg
    關鍵商品詳情
    條件:

    Used

    作業狀態:

    未知

    產品編號:

    63718

    晶圓尺寸:

    3"/75mm, 6"/150mm, 8"/200mm

    年份:

    未知

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor
    配置
    System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS
    OEM 代工型號說明
    Vacuum loadlocked plasma system
    文檔
    文件圖示

    TRION TITAN.pdf

    類似上架商品
    查看全部
    TRION TITAN

    TRION

    TITAN

    Dry / Plasma Etch年份: 0條件: 二手上次驗證:超過60天前